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Patent Assignment Details
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Reel/Frame:015796/0108   Pages: 3
Recorded: 09/13/2004
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10938789
Filing Dt:
09/13/2004
Publication #:
Pub Dt:
02/24/2005
Title:
Method of etching and etching apparatus
Assignors
1
Exec Dt:
08/26/2004
2
Exec Dt:
08/26/2004
Assignee
1
3-6, AKASAKA 5-CHOME
MINATO-KU, TOKYO 107-8481, JAPAN
Correspondence name and address
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
1940 DUKE STREET
ALEXANDRIA, VA 22314

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