Patent Assignment Details
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| Reel/Frame: | 015845/0406 | |
| Pages: | 4 |
| | Recorded: | 10/04/2004 | | |
| Attorney Dkt #: | 021773-000520us |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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10865230
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Filing Dt:
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06/09/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Title:
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METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING
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Assignee
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| 18 CREATIN ROAD 1 |
| SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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DANIEL MAO
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TWO EMBARCADERO CENTER EIGHTH FLOOR
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SAN FRANCISCO, CA 94111-3834
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