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Reel/Frame:015867/0227   Pages: 4
Recorded: 10/07/2004
Attorney Dkt #:042010
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
7138629
Issue Dt:
11/21/2006
Application #:
10754623
Filing Dt:
01/12/2004
Publication #:
US20050045821
Pub Dt:
03/03/2005
Title:
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING METHOD USING THE TESTING APPARATUS
Assignors
1
NOJI, NOBUHARU
Exec Dt:
09/28/2004
2
SATAKE, TOHRU
Exec Dt:
09/28/2004
3
SOBUKAWA, HIROSI
Exec Dt:
09/28/2004
4
KIMBA, TOSHIFUMI
Exec Dt:
09/28/2004
5
HATAKEYAMA, MASAHIRO
Exec Dt:
09/28/2004
6
YOSHIKAWA, SHOJI
Exec Dt:
09/28/2004
7
MURAKAMI, TAKESHI
Exec Dt:
09/28/2004
8
WATANABE, KENJI
Exec Dt:
09/28/2004
9
KARIMATA, TSUTOMU
Exec Dt:
09/28/2004
10
SUEMATSU, KENICHI
Exec Dt:
09/28/2004
11
TABE, YUTAKA
Exec Dt:
09/28/2004
12
TAJIMA, RYO
Exec Dt:
09/28/2004
13
TOHYAMA, KEIICHI
Exec Dt:
09/28/2004
Assignee
1
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN 3
Correspondence name and address
WESTERMAN, HATTORI, DANIELS &
ADRIAN, LLP
KEN-ICHI HATTORI
1250 CONNECTICUT AVENUE, N.W., SUITE 700
WASHINGTON, D.C. 20036

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