Patent Assignment Details
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| Reel/Frame: | 015881/0708 | |
| Pages: | 2 |
| | Recorded: | 10/04/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/12/2006
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Application #:
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10958141
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Filing Dt:
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10/05/2004
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Publication #:
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Pub Dt:
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04/07/2005
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Title:
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METHOD OF CHARGED PARTICLE BEAM LITHOGRAPHY AND EQUIPMENT FOR CHARGED PARTICLE BEAM LITHOGRAPHY
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Assignees
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| 24-14, NISHISHINBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN 105-8717 |
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| 3-30-2, SHIMOMARUKO |
| OHTA-KU, TOKYO, JAPAN 146-8501 |
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Correspondence name and address
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REED SMITH LLP
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STANLEY P. FISHER
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3110 FAIRVIEW PARK DRIVE, SUITE 1400
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FALLS CHURCH, VIRGINIA 22042
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