Patent Assignment Details
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| Reel/Frame: | 015897/0892 | |
| Pages: | 7 |
| | Recorded: | 10/08/2004 | | |
| Attorney Dkt #: | 008091/PMG/PCTRL |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10960508
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Filing Dt:
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10/08/2004
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Publication #:
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Pub Dt:
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04/13/2006
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Title:
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System, method, and medium for an endpoint detection scheme for copper low-dielectric damascene structures for improved dielectric and copper loss
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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SCOTT M. ALTER
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PATENT COUNSEL, MS/2061
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LEGAL AFFAIRS DEPT., P.O. BOX 450A
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SANTA CLARA, CA 95052
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