Total properties:
34
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Patent #:
|
|
Issue Dt:
|
11/30/1999
|
Application #:
|
08841750
|
Filing Dt:
|
04/30/1997
|
Title:
|
ANTIREFLECTIVE COATING COMPOSITIONS FOR PHOTORESIST COMPOSITIONS AND USE THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/1999
|
Application #:
|
08846986
|
Filing Dt:
|
04/30/1997
|
Title:
|
LIGHT ABSORBING POLYMERS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/27/1999
|
Application #:
|
08939451
|
Filing Dt:
|
09/29/1997
|
Title:
|
FRACTIONATED NOVOLAK RESIN COPOLYMER AND PHOTORESIST COMPOSITION THEREFROM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/04/2000
|
Application #:
|
08991034
|
Filing Dt:
|
12/15/1997
|
Title:
|
FRACTIONATED NOVOLAK RESIN AND PHOTORESIST COMPOSITION THEREFROM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/20/2000
|
Application #:
|
08995509
|
Filing Dt:
|
12/22/1997
|
Title:
|
PROCESS OF CONTROLLING PARTICLE SIZE OF NAPHTHOQUINONE DIAZIDE ESTERS
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09765540
|
Filing Dt:
|
01/19/2001
|
Publication #:
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|
Pub Dt:
|
09/26/2002
| | | | |
Title:
|
Titration method for aqueous base developer solution
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/2004
|
Application #:
|
09853732
|
Filing Dt:
|
05/11/2001
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
PHOTORESIST COMPOSITION FOR DEEP ULTRAVIOLET LITHOGRAPHY
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
10042532
|
Filing Dt:
|
01/09/2002
|
Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
Title:
|
POSITIVE-WORKING PHOTOIMAGEABLE BOTTOM ANTIREFLECTIVE COATING
|
|
|
Patent #:
|
|
Issue Dt:
|
07/04/2006
|
Application #:
|
10042878
|
Filing Dt:
|
01/09/2002
|
Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
Title:
|
PROCESS FOR PRODUCING AN IMAGE USING A FIRST MINIMUM BOTTOM ANTIREFLECTIVE COATING COMPOSITION
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/2005
|
Application #:
|
10120952
|
Filing Dt:
|
04/11/2002
|
Publication #:
|
|
Pub Dt:
|
10/16/2003
| | | | |
Title:
|
PHOTORESIST COMPOSITIONS COMPRISING ACETALS AND KETALS AS SOLVENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2007
|
Application #:
|
10301462
|
Filing Dt:
|
11/21/2002
|
Publication #:
|
|
Pub Dt:
|
05/27/2004
| | | | |
Title:
|
ANTIREFLECTIVE COMPOSITIONS FOR PHOTORESISTS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10322239
|
Filing Dt:
|
12/18/2002
|
Publication #:
|
|
Pub Dt:
|
11/20/2003
| | | | |
Title:
|
Negative-working photoimageable bottom antireflective coating
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10371262
|
Filing Dt:
|
02/21/2003
|
Publication #:
|
|
Pub Dt:
|
08/26/2004
| | | | |
Title:
|
Photoresist composition for deep ultraviolet lithography
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/2006
|
Application #:
|
10376356
|
Filing Dt:
|
02/27/2003
|
Publication #:
|
|
Pub Dt:
|
09/09/2004
| | | | |
Title:
|
PHOTOSENSITIVE COMPOSITION AND USE THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2005
|
Application #:
|
10393925
|
Filing Dt:
|
03/21/2003
|
Publication #:
|
|
Pub Dt:
|
09/23/2004
| | | | |
Title:
|
PHOTORESIST COMPOSITION FOR IMAGING THICK FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
10395747
|
Filing Dt:
|
03/24/2003
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
Title:
|
ASSEMBLY SYSTEM FOR STATIONING SEMICONDUCTOR WAFER SUITABLE FOR PROCESSING AND PROCESS FOR MANUFACTURING SEMICONDUCTOR WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/2006
|
Application #:
|
10439472
|
Filing Dt:
|
05/16/2003
|
Publication #:
|
|
Pub Dt:
|
12/25/2003
| | | | |
Title:
|
PHOTORESIST COMPOSITION FOR DEEP ULTRAVIOLET LITHOGRAPHY COMPRISING A MIXTURE OF PHOTOACTIVE COMPOUNDS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/15/2008
|
Application #:
|
10439753
|
Filing Dt:
|
05/16/2003
|
Publication #:
|
|
Pub Dt:
|
11/18/2004
| | | | |
Title:
|
PHOTOACTIVE COMPOUNDS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/07/2006
|
Application #:
|
10459229
|
Filing Dt:
|
06/11/2003
|
Publication #:
|
|
Pub Dt:
|
12/16/2004
| | | | |
Title:
|
MODIFIED ALGINIC ACID OF ALGINIC ACID DERIVATIVES AND THERMOSETTING ANTI-REFLECTIVE COMPOSITIONS THEREOF
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10609735
|
Filing Dt:
|
06/30/2003
|
Publication #:
|
|
Pub Dt:
|
12/30/2004
| | | | |
Title:
|
Photoacid generators
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2007
|
Application #:
|
10658840
|
Filing Dt:
|
09/09/2003
|
Publication #:
|
|
Pub Dt:
|
08/26/2004
| | | | |
Title:
|
PHOTORESIST COMPOSITION FOR DEEP ULTRAVIOLET LITHOGRAPHY
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10677318
|
Filing Dt:
|
10/03/2003
|
Publication #:
|
|
Pub Dt:
|
04/07/2005
| | | | |
Title:
|
Bottom antireflective coatings
|
|
|
Patent #:
|
|
Issue Dt:
|
04/18/2006
|
Application #:
|
10721883
|
Filing Dt:
|
11/26/2003
|
Publication #:
|
|
Pub Dt:
|
05/26/2005
| | | | |
Title:
|
BOTTOM ANTIREFLECTIVE COATINGS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2007
|
Application #:
|
10734022
|
Filing Dt:
|
12/11/2003
|
Publication #:
|
|
Pub Dt:
|
06/16/2005
| | | | |
Title:
|
PHOTORESIST COMPOSITION FOR DEEP UV AND PROCESS THEREOF
|
|
|
Patent #:
|
|
Issue Dt:
|
04/25/2006
|
Application #:
|
10748778
|
Filing Dt:
|
12/29/2003
|
Publication #:
|
|
Pub Dt:
|
07/07/2005
| | | | |
Title:
|
PHOTORESIST COMPOSITION
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10796376
|
Filing Dt:
|
03/09/2004
|
Publication #:
|
|
Pub Dt:
|
09/15/2005
| | | | |
Title:
|
Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10808884
|
Filing Dt:
|
03/25/2004
|
Publication #:
|
|
Pub Dt:
|
09/29/2005
| | | | |
Title:
|
Positive-working photoimageable bottom antireflective coating
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/2006
|
Application #:
|
10817987
|
Filing Dt:
|
04/05/2004
|
Publication #:
|
|
Pub Dt:
|
10/20/2005
| | | | |
Title:
|
PROCESS FOR MAKING POLYESTERS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10835012
|
Filing Dt:
|
04/29/2004
|
Publication #:
|
|
Pub Dt:
|
10/07/2004
| | | | |
Title:
|
Photoresist compositions
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10863042
|
Filing Dt:
|
06/08/2004
|
Publication #:
|
|
Pub Dt:
|
12/08/2005
| | | | |
Title:
|
Photoactive compounds
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10869417
|
Filing Dt:
|
06/16/2004
|
Publication #:
|
|
Pub Dt:
|
12/22/2005
| | | | |
Title:
|
Aqueous edge bead remover
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10875596
|
Filing Dt:
|
06/24/2004
|
Publication #:
|
|
Pub Dt:
|
09/15/2005
| | | | |
Title:
|
Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/2006
|
Application #:
|
10909513
|
Filing Dt:
|
08/02/2004
|
Publication #:
|
|
Pub Dt:
|
02/02/2006
| | | | |
Title:
|
PHOTORESIST COMPOSITIONS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10941221
|
Filing Dt:
|
09/15/2004
|
Publication #:
|
|
Pub Dt:
|
03/16/2006
| | | | |
Title:
|
Antireflective compositions for photoresists
|
|