Patent Assignment Details
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| Reel/Frame: | 015959/0559 | |
| Pages: | 3 |
| | Recorded: | 03/24/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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11023862
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Filing Dt:
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12/28/2004
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Publication #:
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Pub Dt:
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06/29/2006
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Title:
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MULTI-STEP METHODS FOR CHEMICAL MECHANICAL POLISHING SILICON DIOXIDE AND SILICON NITRIDE
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Assignee
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| 1105 NORTH MARKET STREET, SUITE 1300 |
| WILMINGTON, DELAWARE 19899 |
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Correspondence name and address
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EDWIN OH
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ROHM AND HAAS ELECTRONIC MATERIALS
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CMP HOLDINGS, INC.
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1105 NORTH MARKET STREET, SUITE 1300
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WILMINGTON, DE 19899
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