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Total properties:
19
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Patent #:
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Issue Dt:
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09/03/2002
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Application #:
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08672073
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Filing Dt:
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06/26/1996
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Publication #:
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Pub Dt:
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04/18/2002
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Title:
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IMAGE PICKUP APPARATUS HAVING ELECTRONIC ZOOM BASED ON OPTICAL ZOOMING FOCAL LENGTH VARIATION WITH TIME
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09444815
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Filing Dt:
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11/22/1999
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Title:
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OPTICAL SYSTEM, IN PARTICULAR PROJECTION-ILLUMINATION UNIT USED IN MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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08/07/2001
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Application #:
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09490890
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Filing Dt:
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01/27/2000
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Title:
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Apparatus for tilting an object about at least one axis, in particular an optical element
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09491666
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Filing Dt:
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01/27/2000
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Title:
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ASSEMBLY COMPRISING AN OPTICAL ELEMENT AND A MOUNT
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09503023
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Filing Dt:
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02/14/2000
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Title:
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Adjustable Assembly
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Patent #:
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Issue Dt:
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08/14/2001
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Application #:
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09504030
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Filing Dt:
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02/14/2000
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Title:
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Device for displacing an optical element along thr optical axis
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Patent #:
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Issue Dt:
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11/19/2002
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Application #:
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09504663
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Filing Dt:
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02/14/2000
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Title:
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PROJECTION EXPOSURE SYSTEM AND AN EXPOSURE METHOD IN MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09510875
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Filing Dt:
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02/22/2000
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Title:
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Method and device for mutually aligning a mask pattern formed in a mask and a substrate
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Patent #:
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Issue Dt:
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07/09/2002
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Application #:
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09564444
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Filing Dt:
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05/04/2000
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Title:
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OBJECTIVE, IN PARTICULAR AN OBJECTIVE FOR A SEMICONDUCTOR LITHOGRAPHY PROJECTION EXPOSURE MACHINE, AND A PRODUCTION METHOD
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09587858
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Filing Dt:
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06/06/2000
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Title:
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Assembly comprising an optical element and a mount
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Patent #:
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Issue Dt:
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02/07/2006
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Application #:
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09588261
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Filing Dt:
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06/06/2000
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Title:
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DEVICE FOR REDUCING THE PEAK POWER OF A PULSED LASER LIGHT SOURCE
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09669501
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Filing Dt:
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09/25/2000
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Title:
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ROTARY BEARING
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Patent #:
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Issue Dt:
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09/03/2002
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Application #:
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09678715
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Filing Dt:
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10/04/2000
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Title:
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OPTICAL IMAGING DEVICE, IN PARTICULAR LENS SYSTEM, WITH AT LEAST ONE SYSTEM DIAPHRAGM
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09692256
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Filing Dt:
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10/19/2000
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Title:
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METHOD OF STRAIGHTENING THE SUPPORTING SURFACES OF SUPPORTING ELEMENTS FOR OPTICAL ELEMENTS
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09717560
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Filing Dt:
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11/21/2000
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Title:
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SYSTEM FOR COMPENSATING DIRECTIONAL AND POSITIONAL FLUCTUATIONS IN LIGHT PRODUCED BY A LASER
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09722603
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Filing Dt:
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11/27/2000
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Title:
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DEVICE FOR THE LOW-DEFORMATION SUPPORT OF AN OPTICAL ELEMENT AND METHOD FOR THE LOW-DEFORMATION SUPPORT OF THE OPTICAL ELEMENT
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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09847658
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Filing Dt:
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05/02/2001
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Publication #:
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Pub Dt:
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01/24/2002
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Title:
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PROJECTION LENS, IN PARTICULAR FOR MICROLITHOGRAPHY
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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09946801
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Filing Dt:
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09/04/2001
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Publication #:
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Pub Dt:
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03/14/2002
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Title:
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METHOD FOR HEATING A WORKPIECE
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Patent #:
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Issue Dt:
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01/04/2005
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Application #:
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10045260
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Filing Dt:
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11/07/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Title:
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METHOD FOR THE INTERFEROMETRIC MEASUREMENT OF NON-ROTATIONALLY SYMMETRIC WAVEFRONT ERRORS
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