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Patent Assignment Details
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Reel/Frame:016076/0387   Pages: 5
Recorded: 12/15/2004
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/23/2007
Application #:
10837912
Filing Dt:
05/03/2004
Title:
INDUCTIVELY-COUPLED TORODIAL PLASMA SOURCE
Assignors
1
Exec Dt:
08/21/1997
2
Exec Dt:
08/22/1997
3
Exec Dt:
08/25/1997
4
Exec Dt:
08/22/1997
Assignee
1
90 INDUSTRIAL WAY
WILMINGTON, MASSACHUSETTS 01887
Correspondence name and address
PATENT ADMINISTRATOR
PROSKAUER ROSE LLP
ONE INTERNATIONAL PLACE
14TH FLOOR
BOSTON, MA 02110-2600

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