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Patent Assignment Details
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Reel/Frame:016101/0810   Pages: 4
Recorded: 12/13/2004
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11011950
Filing Dt:
12/13/2004
Publication #:
Pub Dt:
06/15/2006
Title:
Novel method and apparatus for integrating fault detection and real-time virtual metrology in an advanced process control framework
Assignors
1
Exec Dt:
11/18/2004
2
Exec Dt:
11/18/2004
3
Exec Dt:
11/18/2004
4
Exec Dt:
11/18/2004
5
Exec Dt:
11/18/2004
Assignee
1
NO. 8. LI-HSIN RD. 6
SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU, R.O.C., TAIWAN
Correspondence name and address
TUNG & ASSOCIATES
RANDY W. TUNG
838 W. LONG LAKE ROAD, SUITE 120
BLOOMFIELD HILLS, MICHIGAN 48302

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