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Patent Assignment Details
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Reel/Frame:016157/0133   Pages: 6
Recorded: 01/14/2005
Attorney Dkt #:07553.0049
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10844498
Filing Dt:
05/13/2004
Publication #:
Pub Dt:
05/19/2005
Title:
Etching method and plasma etching apparatus
Assignors
1
Exec Dt:
11/05/2004
2
Exec Dt:
11/05/2004
3
Exec Dt:
11/05/2004
4
Exec Dt:
11/05/2004
5
Exec Dt:
11/05/2004
6
Exec Dt:
11/05/2004
7
Exec Dt:
11/05/2004
Assignees
1
3-6, AKASAKA 5-CHOME
MINATO-KU
TOKYO, JAPAN
2
1-1, SHIBAURA 1-CHOME
MINATO-KU, TOKYO, JAPAN
Correspondence name and address
ERNEST F. CHAPMAN
FINNEGAN, HENDERSON, FARABOW ET AL.
1300 I STREET, N.W.
WASHINGTON, DC 20005-3315

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