Total properties:
47
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Patent #:
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Issue Dt:
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05/24/1988
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Application #:
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06938498
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Filing Dt:
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12/05/1986
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Title:
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PLANAR TUNGSTEN INTERCONNECT
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Patent #:
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Issue Dt:
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03/06/1990
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Application #:
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07158759
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Filing Dt:
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02/22/1988
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Title:
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PLANAR TUNGSTEN INTERCONNECT WITH IMPLANTED SILICON
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Patent #:
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Issue Dt:
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12/10/1991
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Application #:
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07313206
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Filing Dt:
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02/21/1989
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Title:
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MICRODYNAMIC RELEASE STRUCTURE
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Patent #:
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Issue Dt:
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09/22/1992
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Application #:
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07762492
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Filing Dt:
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09/19/1991
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Title:
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SELECTIVE CHEMICAL VAPOR DEPOSITION OF TUNGSTEN FOR MICRODYNAMIC STRUCTURES
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Patent #:
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Issue Dt:
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04/06/1993
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Application #:
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07803986
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Filing Dt:
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12/09/1991
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Title:
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SILICON TIP FIELD EMISSION CATHODE ARRAYS AND FABRICATION THEREOF
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Patent #:
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Issue Dt:
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03/30/1993
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Application #:
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07821944
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Filing Dt:
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01/16/1992
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Title:
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RIE PROCESS FOR FABRICATING SUBMICRON, SILICON ELECTROMECHANICAL STRUCTURES
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Patent #:
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Issue Dt:
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01/12/1993
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Application #:
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07868102
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Filing Dt:
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04/14/1992
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Title:
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MULTI-DIMENSIONAL PRECISION MICRO-ACTUATOR
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Patent #:
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Issue Dt:
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08/10/1993
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Application #:
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07868138
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Filing Dt:
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04/14/1992
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Title:
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METHODS OF FABRICATING INTEGRATED, ALIGNED TUNNELING TIP PAIRS
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Patent #:
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Issue Dt:
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03/14/1995
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Application #:
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07906873
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Filing Dt:
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07/02/1992
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Title:
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TRANSISTOR MICROSTRUCTURE
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Patent #:
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Issue Dt:
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02/15/1994
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Application #:
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07906877
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Filing Dt:
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07/02/1992
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Title:
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SUBMICRON ISOLATED, RELEASED RESISTOR STRUCTURE
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Patent #:
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Issue Dt:
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12/20/1994
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Application #:
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08002500
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Filing Dt:
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01/06/1993
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Title:
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MULTI-DIMENSIONAL PRECISION MICRO-ACTUATOR
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Patent #:
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Issue Dt:
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05/31/1994
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Application #:
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08038879
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Filing Dt:
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03/29/1993
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Title:
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RIE PROCESS FOR FABRICATING SUBMICRON, SILICON ELECTROMECHANICAL STRUCTURES
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Patent #:
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Issue Dt:
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06/20/1995
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Application #:
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08067089
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Filing Dt:
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05/26/1993
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Title:
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MICROSTRUCTURES AND HIGH TEMPERATURE ISOLATION PROCESS FOR FABRICATION THEREOF
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Patent #:
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Issue Dt:
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10/08/1996
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Application #:
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08067264
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Filing Dt:
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05/26/1993
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Title:
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MICROELECTROMECHANICAL LATERAL ACCELEROMETER
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|
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Patent #:
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Issue Dt:
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07/16/1996
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Application #:
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08069725
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Filing Dt:
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06/01/1993
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Title:
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COMPOUND STAGE MEM ACTUATOR SUSPENDED FOR MULTIDIMENSIONAL MOTION
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Patent #:
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Issue Dt:
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03/21/1995
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Application #:
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08071260
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Filing Dt:
|
06/04/1993
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Title:
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ISOLATED TUNGSTEN MICROELECTROMECHANICAL STRUCTURES
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|
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Patent #:
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Issue Dt:
|
09/12/1995
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Application #:
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08076906
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Filing Dt:
|
06/15/1993
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Title:
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METHODS OF FABRICATING INTEGRATED, ALIGNED TUNNELING TIP PAIRS
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|
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Patent #:
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|
Issue Dt:
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11/08/1994
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Application #:
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08089821
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Filing Dt:
|
07/12/1993
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Title:
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MASSIVELY PARALLEL ARRAY CATHODE
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|
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Patent #:
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|
Issue Dt:
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02/28/1995
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Application #:
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08171965
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Filing Dt:
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12/22/1993
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Title:
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PROCESS FOR FABIRCATING SUBMICRON SINGLE CRYSTAL ELECTROMECHANICAL STRUCTURES
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|
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Patent #:
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|
Issue Dt:
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02/28/1995
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Application #:
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08207348
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Filing Dt:
|
03/07/1994
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Title:
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CABLE HANGER
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|
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Patent #:
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|
Issue Dt:
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03/11/1997
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Application #:
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08246265
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Filing Dt:
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05/19/1994
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Title:
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MICROELECTROMECHANICAL LATERAL ACCELEROMETER
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|
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Patent #:
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|
Issue Dt:
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03/25/1997
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Application #:
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08308803
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Filing Dt:
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09/19/1994
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Title:
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OPTOMECHANICAL TERABIT DATA STORAGE SYSTEM
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|
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Patent #:
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Issue Dt:
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12/08/1998
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Application #:
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08310336
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Filing Dt:
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09/22/1994
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Title:
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ELECTRICALLY ISOLATED RELEASED MICROSTRUCTURES
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|
|
Patent #:
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|
Issue Dt:
|
02/17/1998
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Application #:
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08312797
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Filing Dt:
|
09/27/1994
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Title:
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MICROSTRUCTURES AND SINGLE MASK, SINGLE-CRYSTAL PROCESS FOR FABRICATION THEREOF
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|
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Patent #:
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|
Issue Dt:
|
05/13/1997
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Application #:
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08383524
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Filing Dt:
|
02/03/1995
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Title:
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MASKING PROCESS FOR FABRICATING ULTRA-HIGH ASPECT RATIO, WAFER-FREE MICRO-OPTO-ELECTROMECHANICAL STRUCTURES
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|
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Patent #:
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|
Issue Dt:
|
04/09/1996
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Application #:
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08443331
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Filing Dt:
|
05/17/1995
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Title:
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METHOD OF FORMING COMPOUND STAGE MEM ACTUATOR SUSPENDED FOR MULTIDIMENSIONAL MOTION
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|
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Patent #:
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|
Issue Dt:
|
05/06/1997
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Application #:
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08464532
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Filing Dt:
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06/05/1995
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Title:
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SILICON TIP FIELD EMISSION CATHODES
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|
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Patent #:
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|
Issue Dt:
|
06/17/1997
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Application #:
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08494024
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Filing Dt:
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06/23/1995
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Title:
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CAPACITANCE BASED TUNABLE MICROMECHANICAL RESONATORS
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|
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Patent #:
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|
Issue Dt:
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03/13/2001
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Application #:
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08568845
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Filing Dt:
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12/07/1995
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Title:
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MICROMECHANICAL ACCELEROMETER FOR AUTOMOTIVE APPLICATIONS
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|
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Patent #:
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|
Issue Dt:
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12/01/1998
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Application #:
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08573308
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Filing Dt:
|
12/15/1995
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Title:
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HIGH ASPECT RATIO PROBES WITH SELF-ALIGNED CONTROL ELECTRODES
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|
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Patent #:
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|
Issue Dt:
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03/10/1998
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Application #:
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08588919
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Filing Dt:
|
01/19/1996
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Title:
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COMPOUND STAGE MEM ACTUATOR SUSPENDED FOR MULTIDIMENSIONAL MOTION
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|
|
Patent #:
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|
Issue Dt:
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05/23/2000
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Application #:
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08665369
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Filing Dt:
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06/19/1996
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Title:
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MICROMACHINED SILICON PROBE FOR SCANNING PROBE MICROSCOPY
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|
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Patent #:
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|
Issue Dt:
|
01/19/1999
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Application #:
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08667880
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Filing Dt:
|
06/20/1996
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Title:
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MICROMOTION AMPLIFIER
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|
|
Patent #:
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|
Issue Dt:
|
06/23/1998
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Application #:
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08668378
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Filing Dt:
|
06/21/1996
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Title:
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TRENCH-FILLING ETCH-MASKING MICROFABRICATION TECHNIQUE
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|
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Patent #:
|
|
Issue Dt:
|
07/28/1998
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Application #:
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08670725
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Filing Dt:
|
06/21/1996
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Title:
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MICROELECTROMECHANICAL INTEGRATED MICROLOADING DEVICE
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|
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Patent #:
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Issue Dt:
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06/13/2000
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Application #:
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08683929
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Filing Dt:
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07/19/1996
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Title:
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MICROFABRICATED TORSIONAL CANTILEVERS FOR SENSITIVE FORCE DETECTION
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|
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Patent #:
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Issue Dt:
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01/05/1999
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Application #:
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08771681
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Filing Dt:
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12/23/1996
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Title:
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MICROELECTROMECHANICS-BASED FREQUENCY SIGNATURE SENSOR
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|
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Patent #:
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Issue Dt:
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12/08/1998
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Application #:
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08804826
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Filing Dt:
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02/24/1997
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Title:
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MICROSTRUCTURE AND SINGLE MASK,SINGLE-CRYSTAL PROCESS FOR FABRICATION THEREOF
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|
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Patent #:
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|
Issue Dt:
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07/25/2000
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Application #:
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08867060
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Filing Dt:
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06/02/1997
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Title:
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MICROFABRICATION PROCESS FOR ENCLOSED MICROSTRUCTURES
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|
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Patent #:
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|
Issue Dt:
|
06/22/1999
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Application #:
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08915648
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Filing Dt:
|
08/21/1997
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Title:
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MULTISTABLE TUNABLE MICROMECHANICAL RESONATORS
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|
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Patent #:
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|
Issue Dt:
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11/21/2000
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Application #:
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09030641
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Filing Dt:
|
04/03/1998
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Title:
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MICROMECHANICAL ACCELEROMETER FOR AUTOMOTIVE APPLICATIONS
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|
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Patent #:
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|
Issue Dt:
|
12/14/1999
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Application #:
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09045573
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Filing Dt:
|
03/23/1998
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Title:
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DRIVE ELECTRODES FOR MICROFABRICATED TORSIONAL CANTILEVERS
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|
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09090840
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Filing Dt:
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06/04/1998
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Title:
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SUSPENDED MOVING CHANNNELS AND CHANNEL ACTUATORS FOR MICROFLUIDIC APPLICATIONS AND METHOD FOR MAKING
|
|
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Patent #:
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Issue Dt:
|
04/18/2000
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Application #:
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09132254
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Filing Dt:
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08/11/1998
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Title:
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MICROSTRUCTURES AND SINGLE MASK, SINGLE-CRYSTAL PROCESS FOR FABRICATION THEREOF
|
|
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Patent #:
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|
Issue Dt:
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02/22/2000
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Application #:
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09135176
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Filing Dt:
|
08/18/1998
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Title:
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METHOD OF MAKING HIGH ASPECT RATIO PROBES WITH SELF-ALIGNED CONTROL
|
|
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Patent #:
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Issue Dt:
|
06/12/2001
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Application #:
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09156037
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Filing Dt:
|
09/17/1998
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Title:
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INTEGRATED MONOLITHIC MICROFABRICATED ELECTROSPRAY AND LIQUID CHROMATOGRAPHY SYSTEM AND METHOD
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|
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Patent #:
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|
Issue Dt:
|
09/03/2002
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Application #:
|
09334408
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Filing Dt:
|
06/16/1999
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Title:
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METHOD OF FABRICATING MICROELECTROMECHANICAL AND MICROFLUIDIC DEVICES
|
|