Patent Assignment Details
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| Reel/Frame: | 016190/0177 | |
| Pages: | 4 |
| | Recorded: | 05/04/2005 | | |
| Attorney Dkt #: | 2004-0008-01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/29/2008
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Application #:
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11067124
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Filing Dt:
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02/25/2005
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Publication #:
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Pub Dt:
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08/31/2006
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Title:
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METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY
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Assignee
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| 17075 THORNMINT COURT, LEGAL DEPT., MS/4-2C |
| CYMER, INC. |
| SAN DIEGO, CALIFORNIA 92127 |
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Correspondence name and address
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WILLIAM C. CRAY
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CYMER, INC.
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LEGAL DEPT., MS/4-2C
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17075 THORNMINT COURT
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SAN DIEGO, CA 92127
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