Patent Assignment Details
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| Reel/Frame: | 016234/0042 | |
| Pages: | 3 |
| | Recorded: | 02/04/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/23/2006
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Application #:
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10956620
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Filing Dt:
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10/01/2004
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Publication #:
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Pub Dt:
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06/02/2005
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Title:
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CHARGED-PARTICLE BEAM LITHOGRAPHIC SYSTEM
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Assignee
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| 1-2, MUSASHINO, AKISHIMA |
| TOKYO 196-8558,, JAPAN |
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Correspondence name and address
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WEBB ZIESENHEIM LOGSDON ET.AL.
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DAVID C. HANSON
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700 KOPPERS BUILDING
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436 SEVENTH AVENUE
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PITTSBURGH, PA 15219
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