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Reel/Frame:016246/0909   Pages: 2
Recorded: 02/02/2005
Attorney Dkt #:62758-099
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/31/2006
Application #:
11047675
Filing Dt:
02/02/2005
Publication #:
Pub Dt:
08/11/2005
Title:
STAGE CONTROL METHOD, A STAGE CONTROL SYSTEM, AND A SEMICONDUCTOR MANUFACTURING EQUIPMENT
Assignors
1
Exec Dt:
01/12/2005
2
Exec Dt:
01/12/2005
Assignee
1
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU
TOKYO 105-8717, JAPAN
Correspondence name and address
MCDERMOTT WILL & EMERY LLP
KEITH E. GEORGE
600 13TH STREET, N.W.
WASHINGTON, D.C. 20005-3096

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