Patent Assignment Details
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| Reel/Frame: | 016271/0529 | |
| Pages: | 4 |
| | Recorded: | 02/09/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11055165
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Filing Dt:
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02/09/2005
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Publication #:
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Pub Dt:
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07/14/2005
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Title:
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Method for toolmatching and troubleshooting a plasma processing system
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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THELEN REID & PRIEST LLP
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P.O. BOX 640640
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SAN JOSE, CA 95164-0640
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