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Reel/Frame:016322/0596   Pages: 3
Recorded: 02/18/2005
Attorney Dkt #:1232-5610
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/13/2007
Application #:
11062026
Filing Dt:
02/18/2005
Publication #:
Pub Dt:
08/25/2005
Title:
EUV LIGHT SPECTRUM MEASURING APPARATUS AND CALCULATING METHOD OF EUV LIGHT INTENSITY
Assignors
1
Exec Dt:
02/14/2005
2
Exec Dt:
02/14/2005
3
Exec Dt:
02/14/2005
Assignee
1
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondence name and address
MORGAN & FINNEGAN LLP
3 WORLD FINANCIAL CENTER
NEW YORK NY 10281-2101

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