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Patent Assignment Details
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Reel/Frame:016342/0242   Pages: 3
Recorded: 08/02/2005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
01/23/2007
Application #:
11021420
Filing Dt:
12/23/2004
Publication #:
Pub Dt:
12/01/2005
Title:
UNIFORMITY CONTROL USING MULTIPLE TILT AXES, ROTATING WAFER AND VARIABLE SCAN VELOCITY
Assignors
1
Exec Dt:
07/28/2005
2
Exec Dt:
07/28/2005
3
Exec Dt:
07/28/2005
4
Exec Dt:
07/28/2005
Assignee
1
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondence name and address
HOFFMAN, WARNICK & D'ALESSANDRO LLC
75 STATE STREET, 14TH FLOOR
ALBANY, NY 12207

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