Patent Assignment Details
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| Reel/Frame: | 016352/0082 | |
| Pages: | 4 |
| | Recorded: | 01/31/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/10/2009
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Application #:
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10497720
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Filing Dt:
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01/31/2005
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Publication #:
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Pub Dt:
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06/16/2005
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Title:
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Electrostatic chuck module and cooling system
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Assignees
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| 1-1, NAKASHIMA 2-CHOME |
| KOKURA-KITA-KU, KITA-KYUSHU-SHI, FUKUOKA, JAPAN |
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| 8-1, YOTSUYA 5-CHOME |
| FUCHU-SHI, TOKYO, JAPAN |
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Correspondence name and address
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CARRIER, BLACKMAN & ASSOC. P.C.
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24101 NOVI ROAD, SUITE 100
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NOVI, MI 48375
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