Patent Assignment Details
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Reel/Frame: | 016374/0263 | |
| Pages: | 4 |
| | Recorded: | 03/10/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/11/2007
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Application #:
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11075806
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Filing Dt:
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03/10/2005
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Publication #:
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Pub Dt:
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09/15/2005
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Title:
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SYSTEM AND METHOD FOR CONTROLLING COMPOSITION FOR LITHOGRAPHY PROCESS IN REAL TIME USING NEAR INFRARED SPECTROMETER
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Assignee
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472-2, GAJWA-DONG, SEO-KU |
INCHEON, KOREA, REPUBLIC OF 404-253 |
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Correspondence name and address
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JAMES, STEWART, KOLASCH ET AL.
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8110 GATEHOUSE RD.
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SUITE 100 EAST, P.O. BOX 747
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FALLS CHURCH, VA 22040-0747
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