Patent Assignment Details
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Reel/Frame: | 016382/0613 | |
| Pages: | 4 |
| | Recorded: | 10/07/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/03/2009
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Application #:
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10510479
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Filing Dt:
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10/07/2004
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Publication #:
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Pub Dt:
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07/07/2005
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Title:
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ECR PLASMA SOURCE AND ECR PLASMA DEVICE
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Assignee
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4-16-30, SHIMORENJAKU |
MITAKA-SHI |
TOKYO 181-0013, JAPAN |
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Correspondence name and address
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STEPHEN A. SOFFEN
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DICKSTEIN SHAPIRO MORIN & OSHINSKY LLP
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2101 L STREET NW
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WASHINGTON, DC 20037-1526
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