Patent Assignment Details
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| Reel/Frame: | 016424/0403 | |
| Pages: | 2 |
| | Recorded: | 03/25/2005 | | |
| Attorney Dkt #: | OKAMOTO.001AUS |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/16/2007
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Application #:
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11090244
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Filing Dt:
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03/25/2005
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Publication #:
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Pub Dt:
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09/29/2005
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Title:
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CHARGED PARTICLE BEAM PHOTOLITHOGRAPHY MACHINE, STANDARD SUBSTRATE FOR CORRECTING MISALIGNMENT FACTOR OF CHARGED PARTICLE BEAM PHOTOLITHOGRAPHY MACHINE, CORRECTING METHOD FOR CHARGED PARTICLE BEAM PHOTOLITHOGRAPHY MACHINE, AND METHOD OF MANUFACTURING ELECTRONIC DEV
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Assignee
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| 32-1, ASAHICHO 1-CHOME, NERIMA-KU |
| TOKYO, 179-0071, JAPAN |
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Correspondence name and address
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YASUO MURAMATSU
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MURAMATSU & ASSOCIATES
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SUITE 225
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7700 IRVINE CENTER DRIVE
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IRVINE, CA 92618
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