Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 016451/0538 | |
| Pages: | 6 |
| | Recorded: | 04/05/2005 | | |
| Attorney Dkt #: | 1857.2090001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/07/2006
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Application #:
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11098561
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Filing Dt:
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04/05/2005
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Publication #:
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Pub Dt:
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08/04/2005
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Title:
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METHODS AND SYSTEMS TO COMPENSATE FOR A STITCHING DISTURBANCE OF A PRINTED PATTERN IN A MASKLESS LITHOGRAPHY SYSTEM UTILIZING OVERLAP OF EXPOSURE ZONES WITH ATTENUATION OF THE AERIAL IMAGE IN THE OVERLAP REGION
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Assignee
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX PLLC
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THEODORE A. WOOD
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, D.C. 20005-3934
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