Total properties:
12
|
|
Patent #:
|
|
Issue Dt:
|
06/13/1995
|
Application #:
|
08178530
|
Filing Dt:
|
01/05/1994
|
Title:
|
WAFER-HANDLING APPARATUS HAVING A RESILLENT MEMBRANE WHICH HOLDS WATER WHEN A VACUM IS APPLIED
|
|
|
Patent #:
|
|
Issue Dt:
|
09/12/1995
|
Application #:
|
08178531
|
Filing Dt:
|
01/05/1994
|
Title:
|
WAFER CARRIER FOR FILM PLANARIZATION
|
|
|
Patent #:
|
|
Issue Dt:
|
03/12/2002
|
Application #:
|
09038875
|
Filing Dt:
|
03/11/1998
|
Title:
|
PARALLEL ALIGNMENT METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
|
|
|
Patent #:
|
|
Issue Dt:
|
10/05/1999
|
Application #:
|
09124160
|
Filing Dt:
|
07/27/1998
|
Title:
|
APPARATUS FOR SENSING THE PRESENCE OF A WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/2000
|
Application #:
|
09247106
|
Filing Dt:
|
02/09/1999
|
Title:
|
ACCURATE POSITIONING OF A WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2001
|
Application #:
|
09247107
|
Filing Dt:
|
02/09/1999
|
Title:
|
NON-CONTACTING SUPPORT FOR A WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
07/31/2001
|
Application #:
|
09247108
|
Filing Dt:
|
02/09/1999
|
Title:
|
SENSING THE PRESENCE OF A WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/2000
|
Application #:
|
09247109
|
Filing Dt:
|
02/09/1999
|
Title:
|
LIFTING AND RINSING A WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/14/2000
|
Application #:
|
09330472
|
Filing Dt:
|
06/11/1999
|
Title:
|
OPTICAL VIEW PORT FOR CHEMICAL MECHANICAL PLANARIZATION ENDPOINT DETECTION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/14/2003
|
Application #:
|
09608618
|
Filing Dt:
|
06/30/2000
|
Title:
|
LIFTING AND RINSING A WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/18/2002
|
Application #:
|
09630507
|
Filing Dt:
|
08/02/2000
|
Title:
|
ACCURATE POSITIONING OF A WAFER
|
|
|
Patent #:
|
|
Issue Dt:
|
12/03/2002
|
Application #:
|
09712825
|
Filing Dt:
|
11/14/2000
|
Title:
|
OPTICAL VIEW PORT FOR CHEMICAL MECHANICAL PLANARIZATION ENDPOINT DETECTION
|
|