Patent Assignment Details
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| Reel/Frame: | 016667/0076 | |
| Pages: | 3 |
| | Recorded: | 06/08/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/31/2009
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Application #:
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11038129
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Filing Dt:
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01/21/2005
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Publication #:
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Pub Dt:
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07/27/2006
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Title:
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METHOD AND CONTROL SYSTEM FOR TREATING A HAFNIUM-BASED DIELECTRIC PROCESSING SYSTEM
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL
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1940 DUKE STREET
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ALEXANDRIA, VIRGINIA 22314
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