Patent Assignment Details
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| Reel/Frame: | 016824/0286 | |
| Pages: | 2 |
| | Recorded: | 11/29/2005 | | |
| Conveyance: | CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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10455129
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Filing Dt:
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06/05/2003
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Publication #:
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Pub Dt:
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12/11/2003
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Title:
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ABRASIVE PARTICLES TO CLEAN SEMICONDUCTOR WAFERS DURING CHEMICAL MECHANICAL PLANARIZATION
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Assignee
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| BOX 879209 |
| TEMPE, ARIZONA 85287 |
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Correspondence name and address
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NATIONAL SCIENCE FOUNDATION
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4201 WILSON BLVD.
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ROOM 1265
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ARLINGTON, VA 22230
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