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Reel/Frame:016830/0121   Pages: 3
Recorded: 12/15/2004
Attorney Dkt #:263261US0PCT
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
08/22/2006
Application #:
10518025
Filing Dt:
12/15/2004
Publication #:
Pub Dt:
11/17/2005
Title:
METHOD OF CVD FOR FORMING SILICON NITRIDE FILM ON SUBSTRATE
Assignors
1
Exec Dt:
12/01/2004
2
Exec Dt:
12/01/2004
3
Exec Dt:
12/01/2004
4
Exec Dt:
12/01/2004
Assignee
1
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-8481
Correspondence name and address
OBLON, SPIVAK, MCCLELLAND, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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