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Patent Assignment Details
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Reel/Frame:016835/0826   Pages: 3
Recorded: 09/23/2005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 9
1
Patent #:
Issue Dt:
03/26/2002
Application #:
09131666
Filing Dt:
08/10/1998
Title:
DATA CLASSIFICATION METHOD AND DATA MANAGEMENT METHOD, DATABASE AND DATA STORAGE MEDIUM BASED ON THAT DATA CLASSIFICATION METHOD
2
Patent #:
Issue Dt:
11/05/2002
Application #:
09697174
Filing Dt:
10/27/2000
Title:
LOAD PORT SYSTEM FOR SUBSTRATE PROCESSING SYSTEM, AND METHOD OF PROCESSING SUBSTRATE
3
Patent #:
Issue Dt:
10/12/2004
Application #:
09925679
Filing Dt:
08/10/2001
Publication #:
Pub Dt:
02/21/2002
Title:
RESIST COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE RESIST COMPOSITION
4
Patent #:
Issue Dt:
05/04/2004
Application #:
09986353
Filing Dt:
11/08/2001
Publication #:
Pub Dt:
06/20/2002
Title:
PROJECTION ALIGNER, EXPOSING METHOD AND SEMICONDUCTOR DEVICE
5
Patent #:
Issue Dt:
04/19/2005
Application #:
10050161
Filing Dt:
01/18/2002
Publication #:
Pub Dt:
07/25/2002
Title:
APPARATUS AND METHOD OF CLEANING A SUBSTRATE
6
Patent #:
Issue Dt:
07/18/2006
Application #:
10191802
Filing Dt:
07/10/2002
Publication #:
Pub Dt:
01/16/2003
Title:
WAFER CARRIER, WAFER CONVEYING SYSTEM, STOCKER, AND METHOD OF REPLACING GAS
7
Patent #:
Issue Dt:
11/16/2004
Application #:
10207011
Filing Dt:
07/30/2002
Publication #:
Pub Dt:
02/13/2003
Title:
LOAD PORT, WAFER PROCESSING APPARATUS, AND METHOD OF REPLACING ATMOSPHERE
8
Patent #:
NONE
Issue Dt:
Application #:
10676082
Filing Dt:
10/02/2003
Publication #:
Pub Dt:
03/25/2004
Title:
Composition for anti-reflective coating and method for manufacturing semiconductor device
9
Patent #:
NONE
Issue Dt:
Application #:
11078728
Filing Dt:
03/14/2005
Publication #:
Pub Dt:
07/21/2005
Title:
Apparatus and method of cleaning a substrate
Assignor
1
Exec Dt:
06/01/2005
Assignee
1
2-4-1, MARUNOUCHI, CHIYODA-KU
TOKYO 100-6334, JAPAN
Correspondence name and address
WILLIAM T. ELLIS
FOLEY & LARDNER LLP
WASHINGTON HARBOUR
3000 K STREET, N.W., SUITE 500
WASHINGTON, D.C. 20007-5143

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