Patent Assignment Details
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| Reel/Frame: | 016866/0091 | |
| Pages: | 7 |
| | Recorded: | 10/10/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/26/2006
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Application #:
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10523777
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Filing Dt:
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07/08/2005
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Publication #:
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Pub Dt:
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12/29/2005
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Title:
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METHOD AND SYSTEM FOR DYNAMIC MODELING AND RECIPE OPTIMIZATION OF SEMICONDUCTOR ETCH PROCESSES
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Assignee
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| TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107, JAPAN |
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Correspondence name and address
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JOSEPH R. JORDAN, ESQ.
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WOOD, HERRON & EVANS, L.L.P.
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2700 CAREW TOWER
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CINCINNATI, OHIO 45202
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