Patent Assignment Details
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| Reel/Frame: | 017017/0629 | |
| Pages: | 4 |
| | Recorded: | 11/14/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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11229153
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Filing Dt:
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09/16/2005
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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MULTIVARIATE CONTROL OF SEMICONDUCTOR PROCESSES
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Assignee
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887 |
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Correspondence name and address
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PATENT ADMINISTRATOR
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PROSKAUER ROSE LLP
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ONE INTERNATIONAL PLACE
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22ND FLOOR
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BOSTON, MA 02110-2600
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