Patent Assignment Details
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Reel/Frame: | 017068/0673 | |
| Pages: | 2 |
| | Recorded: | 10/03/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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11242705
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Filing Dt:
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10/03/2005
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Title:
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METHOD AND APPARATUS FOR CLEANING A WAFER BEVEL EDGE AND NOTCH USING A PIN AND AN ABRASIVE FILM CASSETTE
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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ROGER C. KUAN, ESQ.
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MARTINE PENILLA & GENCARELLA, LLP
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710 LAKEWAY DRIVE SUITE 200
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SUNNYVALE, CA 94085
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