Patent Assignment Details
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Reel/Frame: | 017167/0945 | |
| Pages: | 3 |
| | Recorded: | 10/31/2005 | | |
Attorney Dkt #: | NRCAP033 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11262882
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Filing Dt:
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10/31/2005
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Publication #:
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Pub Dt:
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05/03/2007
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Title:
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Active damper with counter mass to compensate for structural vibrations of a lithographic system
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Assignee
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2-3 MARUNOUCHI, 3-CHOME CHIYODA-KU |
TOKYO, JAPAN 100-8331 |
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Correspondence name and address
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PEGGY A. SU
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AKA CHAN LLP
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900 LAFAYETTE STREET, SUITE 710
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SANTA CLARA, CA 95050
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