Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 017202/0516 | |
| Pages: | 4 |
| | Recorded: | 02/22/2006 | | |
| Attorney Dkt #: | LMRX-P048 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/29/2008
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Application #:
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10951553
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Filing Dt:
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09/27/2004
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Publication #:
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Pub Dt:
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03/30/2006
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Title:
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METHODS AND APPARATUS FOR MONITORING A PROCESS IN A PLASMA PROCESSING SYSTEM BY MEASURING SELF-BIAS VOLTAGE
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Assignee
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| 4650 CUSHING PARKWAY |
| P1317 |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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IPSG, PC
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PO BOX 700640
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JOSEPH A. NGUYEN
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SAN JOSE, CA 95170
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