Patent Assignment Details
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| Reel/Frame: | 017221/0726 | |
| Pages: | 3 |
| | Recorded: | 11/10/2005 | | |
| Attorney Dkt #: | 263704US26 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/12/2007
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Application #:
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11270775
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Filing Dt:
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11/10/2005
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Publication #:
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Pub Dt:
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05/11/2006
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Title:
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METHOD OF RESETTING SUBSTRATE PROCESSING APPARATUS, STORAGE MEDIUM STORING PROGRAM FOR IMPLEMENTING THE METHOD, AND SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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