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Reel/Frame:017227/0120   Pages: 3
Recorded: 01/23/2006
Attorney Dkt #:199372003910
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/01/2011
Application #:
10779397
Filing Dt:
02/13/2004
Publication #:
Pub Dt:
04/28/2005
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignors
1
Exec Dt:
12/21/2001
2
Exec Dt:
12/21/2001
Assignee
1
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO-TO, JAPAN
Correspondence name and address
DAVID L. FEHRMAN
MORRISON & FOERSTER LLP
555 WEST FIFTH STREET
LOS ANGELES, CA 90013-1024

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