Patent Assignment Details
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| Reel/Frame: | 017235/0455 | |
| Pages: | 3 |
| | Recorded: | 11/10/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11273465
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Filing Dt:
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11/10/2005
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Publication #:
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Pub Dt:
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05/11/2006
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Title:
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Substrate processing apparatus and substrate processing method
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Assignee
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| TENJINKITA-CHO 1-1 |
| TERANOUCHI-AGARU 4-CHOME |
| HORIKAWA-DORI, KAMIGYO-KU, KYOTO, JAPAN 602-8585 |
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Correspondence name and address
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OSTROLENK, FABER, GERB & SOFFEN, LLP
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1180 AVENUE OF THE AMERICAS
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NEW YORK, NEW YORK 10036-8403
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