Patent Assignment Details
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| Reel/Frame: | 017300/0215 | |
| Pages: | 2 |
| | Recorded: | 03/01/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/16/2009
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Application #:
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10886572
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Filing Dt:
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07/09/2004
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Publication #:
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Pub Dt:
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03/10/2005
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Title:
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MICROWAVE PLASMA PROCESSING APPARATUS FOR SEMICONDUCTOR ELEMENT PRODUCTION
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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Correspondence name and address
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DAVID W. HILL, ESQ.
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FINNEGAN, HENDERSON, FARABOW, GARRETT
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& DUNNER, L.L.P.
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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