Patent Assignment Details
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Reel/Frame: | 017327/0262 | |
| Pages: | 3 |
| | Recorded: | 12/08/2005 | | |
Attorney Dkt #: | 266746US26PCT |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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10525797
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Filing Dt:
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02/25/2005
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Publication #:
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Pub Dt:
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11/03/2005
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Title:
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SUBSTRATE PROCESSING UNIT, METHOD OF DETECTING END POINT OF CLEANING OF SUBSTRATE PROCESSING UNIT, AND METHOD OF DETECTING END POINT OF SUBSTRATE PROCESSING
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Assignee
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3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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