Patent Assignment Details
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Reel/Frame: | 017350/0604 | |
| Pages: | 3 |
| | Recorded: | 12/08/2005 | | |
Attorney Dkt #: | ASMJP.175AUS |
Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT THE CONVEYING PARTY NAME, PREVIOUSLY RECORDED AT REEL 016711, FRAME 0440. |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11134774
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Filing Dt:
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05/20/2005
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Publication #:
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Pub Dt:
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12/07/2006
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Title:
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Technology of detecting abnormal operation of plasma process
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Assignee
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23-1, 6-CHOME, NAGAYAMA, TAMA-SHI |
TOKYO 106-0025, JAPAN |
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Correspondence name and address
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KNOBBE MARTENS OLSON & BEAR LLP
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2040 MAIN STREET
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FOURTEENTH FLOOR
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IRVINE, CA 92614
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