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Patent Assignment Details
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Reel/Frame:017350/0604   Pages: 3
Recorded: 12/08/2005
Attorney Dkt #:ASMJP.175AUS
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT THE CONVEYING PARTY NAME, PREVIOUSLY RECORDED AT REEL 016711, FRAME 0440.
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11134774
Filing Dt:
05/20/2005
Publication #:
Pub Dt:
12/07/2006
Title:
Technology of detecting abnormal operation of plasma process
Assignors
1
Exec Dt:
06/06/2005
2
Exec Dt:
06/07/2005
Assignee
1
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI
TOKYO 106-0025, JAPAN
Correspondence name and address
KNOBBE MARTENS OLSON & BEAR LLP
2040 MAIN STREET
FOURTEENTH FLOOR
IRVINE, CA 92614

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