Patent Assignment Details
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Reel/Frame: | 017356/0378 | |
| Pages: | 3 |
| | Recorded: | 12/15/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10370857
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Filing Dt:
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02/20/2003
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Publication #:
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Pub Dt:
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08/21/2003
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Title:
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METHOD FOR FORMING A HARD MASK IN A LAYER ON A PLANAR DEVICE
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Assignee
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ST.-MARTIN-STRASSE 53 |
MUENCHEN, GERMANY D-81669 |
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Correspondence name and address
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LERNER & GREENBERG, P.A.
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HOLLYWOOD, FL 33022
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