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Reel/Frame:017372/0372   Pages: 3
Recorded: 03/23/2006
Attorney Dkt #:4641-72711-01/DLS
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11286366
Filing Dt:
11/23/2005
Publication #:
Pub Dt:
08/10/2006
Title:
Wafer stage with wafer positioning and alignment
Assignor
1
Exec Dt:
02/21/2006
Assignee
1
FUJI BUILDING, 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU
TOKYO, JAPAN 100
Correspondence name and address
DONALD L. STEPHENS JR.
KLARQUIST SPARKMAN, LLP
ONE WORLD TRADE CENTER, SUITE 1600
121 S.W. SALMON STREET
PORTLAND, OREGON 97204-2988

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