Patent Assignment Details
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| Reel/Frame: | 017376/0540 | |
| Pages: | 3 |
| | Recorded: | 12/19/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11229586
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Filing Dt:
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09/20/2005
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Publication #:
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Pub Dt:
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05/18/2006
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Title:
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Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
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Assignee
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| 1-2, SHIMOHOZUMI 1-CHOME |
| IBARAKI-SHI, OSAKA 567-8680, JAPAN |
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Correspondence name and address
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SUGHRUE MION, PLLC
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2100 PENNSYLVANIA AVENUE, N.W.
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SUITE 800
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WASHINGTON, DC 20037
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