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Reel/Frame:017416/0373   Pages: 4
Recorded: 12/23/2005
Attorney Dkt #:LMRX-P096/P1482
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/16/2010
Application #:
11317961
Filing Dt:
12/23/2005
Publication #:
Pub Dt:
06/28/2007
Title:
HIGHLY EFFICIENT GAS DISTRIBUTION ARRANGEMENT FOR PLASMA TUBE OF A PLASMA PROCESSING CHAMBER
Assignors
1
Exec Dt:
12/21/2005
2
Exec Dt:
12/21/2005
Assignee
1
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondence name and address
IPSG, P.C.
P.O. BOX 700640
SAN JOSE, CA 95170-0640

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