Patent Assignment Details
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Reel/Frame: | 017618/0609 | |
| Pages: | 2 |
| | Recorded: | 05/15/2006 | | |
Attorney Dkt #: | ASMJP.177AUS |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/18/2010
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Application #:
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11382512
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Filing Dt:
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05/10/2006
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Publication #:
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Pub Dt:
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08/17/2006
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Title:
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METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIELECTRIC CONSTANT AND LOW DIFFUSION COEFFICIENT
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Assignee
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23-1, 6-CHOME, NAGAYAMA |
TAMA-SHI, TOKYO, JAPAN 206-0025 |
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Correspondence name and address
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KATSUHIRO ARAI
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2040 MAIN STREET
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IRVINE, CA 92614
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