Patent Assignment Details
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Reel/Frame: | 017623/0869 | |
| Pages: | 2 |
| | Recorded: | 02/23/2006 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11360891
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Filing Dt:
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02/23/2006
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Publication #:
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Pub Dt:
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08/31/2006
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Title:
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Substrate processing apparatus and substrate processing method
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Assignee
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TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, |
HORIKAWA-DORI, KAMIGYO-KU |
KYOTO 602-8585, JAPAN |
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Correspondence name and address
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OSTROLENK, FABER, GERB ET AL.
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1180 AVENUE OF THE AMERICAS
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NEW YORK, NEW YORK 10036-8403
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