Patent Assignment Details
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| Reel/Frame: | 017637/0353 | |
| Pages: | 2 |
| | Recorded: | 12/21/2005 | | |
| Attorney Dkt #: | 1433.153.101/13.555 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10529412
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Filing Dt:
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12/21/2005
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Publication #:
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Pub Dt:
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06/15/2006
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Title:
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Method and process reactor for sequential gas phase deposition by means of a process chamber and an auxiliary chamber
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Assignee
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| ST.-MARTIN-STR. 53 |
| MUNICH, GERMANY 81669 |
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Correspondence name and address
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DICKE, BILLIG & CZAJA, P.L.L.C.
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FIFTH STREET TOWERS
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100 SOUTH FIFTH STREET, SUITE 2250
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MINNEAPOLIS, MN 55402
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