Patent Assignment Details
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| Reel/Frame: | 017662/0709 | |
| Pages: | 4 |
| | Recorded: | 03/22/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/25/2008
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Application #:
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11329116
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Filing Dt:
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01/11/2006
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Publication #:
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Pub Dt:
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01/11/2007
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Title:
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LASER PLASMA EUV LIGHT SOURCE, TARGET MATERIAL, TAPE MATERIAL, A METHOD OF PRODUCING TARGET MATERIAL, A METHOD OF PROVIDING TARGETS, AND AN EUV EXPOSURE DEVICE
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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Correspondence name and address
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MR. MICHAEL R. KELLY
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FINNEGAN, HENDERSON, FARABOW,
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GARRETT & DUNNER, L.L.P.
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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