Patent Assignment Details
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| Reel/Frame: | 017673/0314 | |
| Pages: | 7 |
| | Recorded: | 03/10/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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11311623
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Filing Dt:
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12/20/2005
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Publication #:
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Pub Dt:
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06/21/2007
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Title:
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SYSTEM AND METHOD FOR DETECTING AT LEAST ONE CONTAMINATION SPECIES IN A LITHOGRAPHIC APPARATUS
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Assignee
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| DE RUN 6501, NL-5504 DR |
| VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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PILLSBURY WINTHROP SHAW ET AL
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P.O. BOX 10500
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1650 TYSONS BOULEVARD
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MCLEAN, VA 22102
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