Patent Assignment Details
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| Reel/Frame: | 017729/0081 | |
| Pages: | 3 |
| | Recorded: | 03/28/2006 | | |
| Attorney Dkt #: | 282314us26 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/16/2008
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Application #:
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11390248
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Filing Dt:
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03/28/2006
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Publication #:
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Pub Dt:
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09/28/2006
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Title:
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PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, CONTROL PROGRAM AND COMPUTER STORAGE MEDIUM WITH ENHANCED SELECTIVITY
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Assignee
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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