Patent Assignment Details
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| Reel/Frame: | 017762/0526 | |
| Pages: | 4 |
| | Recorded: | 04/05/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/08/2010
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Application #:
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11398146
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Filing Dt:
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04/05/2006
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Publication #:
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Pub Dt:
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11/30/2006
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Title:
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METHOD TO INCREASE THE COMPRESSIVE STRESS OF PECVD SILICON NITRIDE FILMS
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Assignee
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| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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KENT J. TOBIN
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TOWNSEND AND TOWNSEND AND CREW LLP
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TWO EMBARCADERO CENTER
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EIGHTH FLOOR
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SAN FRANCISCO, CA 94111-3834
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